Presentation Information

[8p-PA3-28]Optimization of deposition process for resistive CNT used in TFT type bolometer

〇Norika Fukuda1,2, Noriyuki Tonouchi1,2, Tomo Tanaka1,2, Toshie Miyamoto1,2, Megumi Kanaori2, Ryota Yuge1,2 (1.NEC, 2.AIST)

Keywords:

CNT