Presentation Information

[9a-E206-2]Development of an LLM-Driven Closed-Loop Platform for Exploring MOCVD Growth Conditions

〇Ryunosuke Matsumura1,2, Daichi Kozawa1, Ryo Kitaura1,2 (1.National Institute for Materials Science MANA, 2.Hokkaido University Graduate School of Chemical Sciences and Engineering)

Keywords:

MOCVD