Presentation Information
[9a-E310-10]A Study on an Accuracy Validation Method for Non-Rigid Registration between APT Data and STEM Tomography Data Using Atomic-Scale Simulated Datasets II
〇(M2)Akito Mie1, Yugant Gotmare1, Kazunori Iwamitsu1, Yoshito Otake1, Zentaro Akase1, Shigetaka Tomiya1 (1.NAIST)
Keywords:
three-dimentional atom probe,Electron Tomography,Accuracy verification
The purpose of this study is to establish accuracy evaluation metrics for non-rigid registration (NRR) between APT data and STEM tomography data. Since the error map we have proposed thus far cannot sufficiently reflect the shape reproducibility of the overall structure, we introduced Normalized Mutual Information (NMI) as a new evaluation metric in this study.
