Presentation Information
[9p-E308-11]Time-Domain Plasma Impedance Measurement for ECR Plasma Source
〇Sei Mizojiri1, Kazuya Yaginuma1, Kohei Fujiwara2, Takashi Kondo2, Shinji Hara3, Noriyuki Tanba3 (1.Pale Blue, 2.TIRI, 3.Nagoya Univ.)
Keywords:
ECR plasma,6-port correlator
In ECR plasma source using microwaves and magnetic fields, investigating plasma impedance contributes to improving the performance of plasma system and reliability. In this work, using 6-port correlator method enabled the measurement of plasma impedance fluctuations during ignition, steady state, and extinction in the time domain of 100ms order.
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