[9p-PB5-1~3] 15.7 Crystal characterization, impurities and crystal defects

English Presentation

[9p-PB5-1] Microstructural Evolution and Phase Stability of ScAlN/GaN Heterostructures

〇Trang Nakamoto¹, Hayato Nishi², Shota Aizawa², Md Earul Islam³, Takashi Fujii³, Ryuichi Sugie², Tsutomu Araki² (1.Ritsumeikan Univ. R-GIRO, 2.Ritsumeikan Univ. Col. of Sci. & Eng., 3.Ritsumeikan Univ. ROST)

Keywords:

ScAlN,Piezoelectric,GaN substrate