非破壊評価 (2)

10:50 AM - 11:00 AM JST(1:50 AM - 2:00 AM UTC)

[I-214] Study on quantitative evaluation method of substrate preparation level

*Yuichi Iai¹, Shunya Kitamura¹, Yuta Uchida¹, Kenichi Akamine¹ (1. IHI Corporation)

Keywords:

Surface adjustment level,Quantitative evaluation,Lab color space,HSV color space

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