[P01-15p-P] D: Laser processing

[P01-15p-P-16] レーザー照射によるレジスト剥離メカニズムの解明

*Takuto Enomoto¹, Samu Morishita², Yuta Asada¹, Yusuke Murakami¹, Motoya Kurosaki², Masashi Yoshimura³, Hideo Horibe⁴, Tomosumi Kamimura^2,3 (1. Osaka Institute of Technology, 2. Graduate School of Engineering, Osaka Institute of Technology, 3. Institute of Laser Engineering, The University of Osaka, 4. Graduate School of Engineering, Osaka Metropolitan University)