Presentation Information
[P01-15p-P-18]３００ｍｍウエハにおける超伝導量子ビット回路作製時の露光強度パターンのばらつき
*Satoru Odate1, Maekawa Kazuya1, Makoto Konoto1 (1. National Institute of Advanced Industrial Science and Technology.)
Comment
To browse or post comments, you must log in.Log in