[A2-O201] Oral 201

11:30 AM - 11:45 AM JST(2:30 AM - 2:45 AM UTC)

[A2-O201-07] In-plane thermal conductivity measurement for Mo films on low thermal conductive various substrates using a time domain thermoreflectance method with striped pattern heating

*Yuichiro Yamashita¹, Hiroto Arima¹, Takashi Yagi¹ (1. Nat. Inst. Adv. Indus. Sci. & Technol. (Japan))

Keywords:

in-plane/out-of-plane thermal conductivity of thin film,time domain thermoreflectance,striped pattern heating