[A5-O102] Oral 102

5:00 PM - 5:15 PM JST(8:00 AM - 8:15 AM UTC)

[A5-O102-09] Evaluation of Work Function for Zr-N-H Ternary Thin Films

*Daichi Miyazaki¹, Takuto Soma¹, Kohei Yoshimatsu¹, Akira Ohtomo¹ (1. Sci. Tokyo (Japan))

Keywords:

Mixed-anion compounds,Nitride,Hydride,Pulsed-laser deposition,Work function