Presentation Information
[B3-P202-11]Capturing mechanism for defects of anti-reflective coating by polymer membranes: atomistic modelling study
*Albert Iskandarov1, Naohiko Ikuma2, Mamoru Hosoya2, Tomomi Shimazaki1, Kouichi Misumi2, Masanori Tachikawa1 (1. Yokohama City Univ. (Japan), 2. Tokyo Ohka Kogyo Co. Ltd. (Japan))
Keywords:
silicon containing Anti-Reflective Coating,polymer filter,atomistic simulation,π–π interactions