Presentation Information

[C1-P102-23]Synthesis and Characterization of Al-Doped Zinc Oxide Films by Chemical Vapor Deposition

*Ryo Oi1 (1. Yokohama national university (Japan))

Keywords:

Al-doped Zinc Oxide Film,Laser-assisted Chemical Vapor Deposition,Transparent Conductive Oxides,Sheet Resistance,Band-edge Emission