Presentation Information

[C1-P102-24]Preparation of Non-doped and Cr-doped β-Ga2O3 Epitaxial Films by Laser-assisted Chemical Vapor Deposition

*Hayato Nariai1, Akihiko Ito1 (1. Yokohama National Univ. (Japan))

Keywords:

Chemical Vapor Deposition,Gallium Oxide,Cr doping,Optical properties