Presentation Information

[E1-P102-13]The influence of C/H ratio on boron-doped diamond growth and its properties using hot-filament chemical vapor deposition method

*Taekyeong Lee1, Miyoung You1, Pungkeun Song1 (1. Pusan National Univ. (Korea))

Keywords:

Hot-filament chemical vapor deposition (HF-CVD),Boron-doped diamond (BDD),Carbon-to-hydrogen ratio (C/H ratio)