[E2-O301] Oral 301

11:35 AM - 11:50 AM JST(2:35 AM - 2:50 AM UTC)

[E2-O301-06] Measuring mechanical properties of 7.5YSZ epilayer by means of
microcantilever bending test

*Ryuya Urata¹, Junichi Tatami¹, Akihiko Ito¹ (1. Yokohama National Univ. (Japan))

Keywords:

microcantilever bending test,chemical vapor deposition,zirconia