Presentation Information

[G1-P103-09]Evaluation of electronic properties between metal buffer layers and Si(111) substrate for group III nitride growth

*Takehiko Nagai1,2, Kazutaka Mitsuishi3, Hitoshi Tampo1, Norio Terada1,2, Fumio Kawamura3 (1. National Institute of Advanced Industrial Science and Technology (AIST) (Japan), 2. Kagoshima Univ. (Japan), 3. National Institute for Materials Science (NIMS) (Japan))

Keywords:

Photoelectron spectroscopy(UPS,IPES,XPS),Group III-Nitride,Sputtering,Buffer layers