[G3-O301] Oral 301

10:50 AM - 11:10 AM JST(1:50 AM - 2:10 AM UTC)

[G3-O301-03] High-Quality Co-Substituted BiFeO₃ Nanodot Array Fabricated with Electron-Beam-Lithographed HSQ Mask

*Hajime Nakayama¹, Koomok Lee¹, Kuniyuki Kakushima^2,3, Takuya Hoshii^2,3, Satoru Kaneko⁴, Manabu Yasui⁴, Masahito Kurouchi⁴, Kei Shigematsu^1,3,4, Masaki Azuma^1,3,4 (1. Inst. Integrated Res., Inst. of Science Tokyo (Japan), 2. School of Eng., Inst. of Science Tokyo (Japan), 3. Sumitomo Chemical Next-Generation Eco-Friendly Devices Collaborative Res. Cluster, Inst. of Science Tokyo (Japan), 4. KISTEC (Japan))

Keywords:

Multiferroics,Microfabrication,PFM,MFM