Presentation Information
[H3-P102-02]Spin-Spray Growth and Post-Annealing of Ga2O3 Films for Crystallinity and Optical Enhancement
*Kihyun Kim1, Haechan Kim1, Nobuhiro Matsushita2, Kyunghwan Kim1, Jeongsoo Hong1 (1. Dept. of Electrical Eng., Gachon Univ. (Korea), 2. Dept. of Chemistry and Materials Sci., Tokyo Inst. of Tech. (Japan))
Keywords:
Gallium Oxide(Ga2O3),Spin-spray,RTA treatment