[H3-P103] Poster 103

[H3-P103-12] Control of p-type conductivity of amorphous and epitaxial nickel oxide thin films by vacuum ultraviolet irradiation

*Takumu Hirano¹, Yusei Yamanaka¹, Kenta Kaneko¹, Satoru Kaneko^2,1, Akifumi Matsuda¹ (1. Science Tokyo (Japan), 2. KISTEC (Japan))

Keywords:

nickel oxide,p-type semiconductor,thin films,room-temperature process,vacuum-UV light