Presentation Information
[H3-P103-13]Preparation of garnet-type sacrificial layer for free-standing single-crystalline thin film of solid electrolyte LLZTO.
*Akito Machino1, Naonori Sakamoto1, Naoki Wakiya1, Takahiko Kawaguchi1 (1. Shizuoka Univ. (Japan))
Keywords:
LLZTO,sacrificial layer,epitaxial thin film,PLD,garnet structure