[I4-P403] Poster 403

[I4-P403-10] Effects of Substrates on Electrical Resistance and Optical Properties of Boron-doped Diamond Synthesized using Mode Conversion Type Microwave Plasma CVD

*Chinatsu Kato¹, Yukihiro Sakamoto² (1. Graduate school, Chiba institute of technology (Japan), 2. Chiba institute of technology (Japan))

Keywords:

BDD,CVD,Microwave,Plasma