Presentation Information
[16psa-11]Morphological evolution of atomic layer deposited hafnium oxide on aligned carbon nanotube arrays
*Sujuan Ding1, Yifan Liu2, Bing Gao1, Bo Wang1, Zhiyong Zhang2, Chuanhong Jin1 (1. Zhejiang Univ. (China), 2. Peking Univ. (China))
Keywords:
ALD,HfO2,nucleation and growth,aligned CNT arrays,high-resolution STEM
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