NT 25（The 25th International Conference on the Science and Applications of Nanotubes and Low-Dimensional Materials）
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Presentation Information

4:20 PM - 4:40 PM JST(7:20 AM - 7:40 AM UTC)

[17mm-06]Progress in CNT Pellicle Development and Future Prospects

*Yosuke Ono1 (1. Mitsuichemicals, Inc. (Japan))

Keywords:

CNT pellicle,pellicle,EUV lithography,photomask,reticle

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