[17psa] Poster 1

[17psa-48] Structure and Fabrication Process Optimization of Microbolometer Array using Semi-conducting Single-walled Carbon Nanotube Networks

*Tomo Tanaka^1,2, Masahiko Sano¹, Masataka Noguchi^1,2, Megumi Kanaori², Toshie Miyamoto^1,2, Ryota Yuge^1,2 (1. NEC Corporation (Japan), 2. AIST (Japan))

Keywords:

Semi-conducting Single-walled Carbon nanotube,Infrared detector,Microbolometer