[19psa] Poster 1

[19psa-51] CNTFET-Metal Contact Investigations via Voltage Controlled Material Deposition

*Martin Hartmann^1,2, Martin Ernst^1,2, Simon Böttger^1,2, Sascha Hermann^1,2 (1. Center for Microtechnologies, Chemnitz University of Technology (Germany), 2. Center for Materials Architecture and Integration of Nanomembranes, Chemnitz University of Technology (Germany))

Keywords:

carbon nanotube,field-effect transistor,metal contacts