Presentation Information

[19psb-05]Growth of MoS2 on Al(1-x)TixOy by Chemical Vapor Deposition

*Koshiro Kawakami1, Syunsuke Yamamura1, Abdul Kuddus1, Shinichiro Mouri1 (1. Ritsumeikan Univ. (Japan))

Keywords:

mm-scale MoS2,CVD,high-k


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