[MD3] MZ Filters and Photonic Integrated Circuits

5:15 PM - 5:30 PM JST(8:15 AM - 8:30 AM UTC)

[MD3-5] Micro-Vibration Sensing System Based on Silicon Photonic Integrated Circuit

○Huimin Wu^1,2,3, Zexi Liu^1,2,3, Fang Wei^1,4, Kan Gao^1,2, Haoyang Pi^1,2, Qing Ye^1,2, Yi Yan⁴, Haiwen Cai^1,4 (1. Wangzhijiang Innovation Center for Laser, Aerospace Laser Technology and System Department, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800 (China), 2. Key Laboratory of Space Laser Communication and Detection Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800 (China), 3. Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049 (China), 4. ZhangJiang Laboratory, Shanghai 201210 (China))

Keywords:

Photonic integrated circuits,Optical sensing and processing devices

We proposed a compact micro-vibration sensing system based on silicon photonic integrated circuit and demonstrated the vibration measurement with it at several typical frequencies. The integrated scheme achieves higher sensitivity and lower noise level.