[MD3] MZ Filters and Photonic Integrated Circuits

5:15 PM - 5:30 PM JST(8:15 AM - 8:30 AM UTC)

[MD3-5] Micro-Vibration Sensing System Based on Silicon Photonic Integrated Circuit

○Huimin Wu^1,2, Zexi Liu^1,2, Fang Wei^1,3, Kan Gao¹, Haoyang Pi¹, Qing Ye¹, Yi Yan³, Haiwen Cai^1,3 (¹Chinese Academy of Sciences, ²Univ. of Chinese Academy of Sciences, ³ZhangJiang Laboratory)

Keywords:

Photonic integrated circuits,Optical sensing and processing devices

We proposed a compact micro-vibration sensing system based on silicon photonic integrated circuit and demonstrated the vibration measurement with it at several typical frequencies. The integrated scheme achieves higher sensitivity and lower noise level.