[MF1] Thin-Film Devices and Modulator Technologies I

11:00 AM - 11:30 AM JST(2:00 AM - 2:30 AM UTC)Invited

[MF1-1] Wafer-Scale Waveguide Platform on Thin Film Lithium Niobate

○Ya Cheng^1,2 (¹Chinese Academy of Sciences, ²East China Normal Univ.)

We develop photolithography assisted chemo-mechanical etching (PLACE) and apply it for fabricating PICs on TFLN, ranging from low-loss optical delay lines and photonic neural network to EO tunable lasers and high-power waveguide amplifiers.