Presentation Information
[MF1-1]Wafer-Scale Waveguide Platform on Thin Film Lithium Niobate
○Ya Cheng1,2 (1.Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, 2.East China Normal University)
We develop photolithography assisted chemo-mechanical etching (PLACE) and apply it for fabricating PICs on TFLN, ranging from low-loss optical delay lines and photonic neural network to EO tunable lasers and high-power waveguide amplifiers.