[MF3] Integrated Photonic Circuits and Platforms I

5:15 PM - 5:30 PM JST(8:15 AM - 8:30 AM UTC)

[MF3-5] Silicon Oxynitride/Silicon Interlayer Couplers: Flexible Index Control, High Efficiency and Compact on Silicon Platform

○Kaibin Yao¹, Moataz Eissa¹, Tsuyoshi Horikawa¹, Nobuhiko Nishiyama^1,2,3 (1. Dept. of Electrical and Electronic Engineering, Institute of Science Tokyo (Japan), 2. Inst. of Innovative Research (IIR), Institute of Science Tokyo (Japan), 3. Photonics Electronics Technology Research Association (Japan))

Keywords:

Si photonic and heterogeneous platform,Photonic integrated circuits

Two types of high-efficiency and compact interlayer couplers, directional and inverse taper couplers, for multilayer photonic circuits using silicon oxynitride on silicon platform were proposed and fabricated. Over 80% coupling efficiencies were achieved for both structures.