Presentation Information

[ThE1-5]Fabrication of 100 nm-Thick Horizontal Slot Waveguides Using Niobium-Pentoxide for Sensing Devices

Yoshiki Hayama, Nao Suzuki, ○Umi Endo, Katsumi Nakatsuhara (Kanagawa Institute of Technology)

Keywords:

Micro- and nano-optics and related devices

We analyzed and fabricated Nb2O5 horizontal waveguides with 100 nm-thick hollow slot regions. Also, about 100 nm-thick hollow slot structures in horizontal slot waveguides were obtained in fabricated devices.