[ThE1] Sensing, Imaging, and Metasurface Applications

10:15 AM - 10:30 AM JST(1:15 AM - 1:30 AM UTC)

[ThE1-5] Fabrication of 100 nm-Thick Horizontal Slot Waveguides Using Niobium-Pentoxide for Sensing Devices

Yoshiki Hayama¹, Nao Suzuki¹, ○Umi Endo¹, Katsumi Nakatsuhara¹ (1.Kanagawa Institute of Technology)

Keywords:

Micro- and nano-optics and related devices

We analyzed and fabricated Nb₂O₅ horizontal waveguides with 100 nm-thick hollow slot regions. Also, about 100 nm-thick hollow slot structures in horizontal slot waveguides were obtained in fabricated devices.