[TuD2] Advanced Photodetectors

11:30 AM - 11:45 AM JST(2:30 AM - 2:45 AM UTC)

[TuD2-2] Beyond 100 GHz, High Responsivity, Waveguide-Coupled Deeply Recessed Germanium on Silicon Photodiode

○Amir Shahin^1,2, Mathias Berciano^3,2, Conor Coughlan², Didit Yudistira², Shuchi Kaushik², Roger Loo^2,1, Hakim Kobbi², Minkyu Kim², Patrick Carolan², Marta Agati², Dries Van Thourhout^1,2, Maumita Chakrabarti², Peter Verheyen², Yoojin Ban², Filippo Ferraro², Joris Van Campenhout² (1. Ugent (Belgium), 2. IMEC (Belgium), 3. Nubis Communication (United States of America))

Keywords:

Photodetectors,Photonic integrated circuits,Si/Ge

In this work, we report a waveguide deeply recessed Ge/Si photodiode achieving a 3-dB bandwidth of 106 GHz at -2 V along with a high O-band responsivity value of 0.93 A/W.