[TuD2] Advanced Photodetectors

12:00 PM - 12:15 PM JST(3:00 AM - 3:15 AM UTC)

[TuD2-4] 3-dB Bandwidth Enlargement of an InGaAs Photodiode by Inductive Signal Electrode

○Duk-Jun Kim¹, Seok-Jun Yun¹, Shinmo An¹, Dong-Hun Lee¹, Young-Tak Han¹ (1.Electronics and Telecommunications Research Institute (ETRI))

Keywords:

Photodetectors

Four types of backside-illuminated InGaAs photodiodes, all with a mesa diameter of 10 μm but differing in the width and length of the CPW signal electrode, were fabricated. The fabricated photodiodes exhibited a responsivity of 0.66 A/W. Additionally, a 3-dB bandwidth exceeding 67 GHz was achieved for the photodiodes with a 5 μm-wide and 313 or 513 μm-long signal electrode owing to the inductive peaking.