Presentation Information
[TuD2-4]3-dB Bandwidth Enlargement of an InGaAs Photodiode by Inductive Signal Electrode
○Duk-Jun Kim, Seok-Jun Yun, Shinmo An, Dong-Hun Lee, Young-Tak Han (Electronics and Telecommunications Research Institute)
Keywords:
Photodetectors
Four types of backside-illuminated InGaAs photodiodes, all with a mesa diameter of 10 μm but differing in the width and length of the CPW signal electrode, were fabricated. The fabricated photodiodes exhibited a responsivity of 0.66 A/W. Additionally, a 3-dB bandwidth exceeding 67 GHz was achieved for the photodiodes with a 5 μm-wide and 313 or 513 μm-long signal electrode owing to the inductive peaking.