Presentation Information
[TuH1-3]Sub-nanoscale Displacement Measurement by Passive Optics with Elliptically Polarized Reference Light
○Ayumi Ito, Yasuhiro Okamura, Masanori Hanawa (Univ. of Yamanashi)
Keywords:
Emerging non-telecom applications including sensing and imaging
The use of elliptically polarized reference light significantly simplifies optical non-contact sub-nanoscale displacement measurement system while maintaining 99.3% measurement linearity over a range from 0.68 to 1.1 nanometers with a resolution of approximately 0.052 nm.