Presentation Information

[TuH1-3]Sub-nanoscale Displacement Measurement by Passive Optics with Elliptically Polarized Reference Light

○Ayumi Ito1, Yasihiro Okamura1, Masanori Hanawa1 (1.University of Yamanashi)

Keywords:

Emerging non-telecom applications including sensing and imaging

The use of elliptically polarized reference light significantly simplifies optical non-contact sub-nanoscale displacement measurement system while maintaining 99.3% measurement linearity over a range from 0.68 to 1.1 nanometers with a resolution of approximately 0.052 nm.