[TuH1] Polarization and Beam Shaping Components I

9:45 AM - 10:00 AM JST(12:45 AM - 1:00 AM UTC)

[TuH1-3] Sub-nanoscale Displacement Measurement by Passive Optics with Elliptically Polarized Reference Light

○Ayumi Ito¹, Yasihiro Okamura¹, Masanori Hanawa¹ (1. University of Yamanashi (Japan))

Keywords:

Emerging non-telecom applications including sensing and imaging

The use of elliptically polarized reference light significantly simplifies optical non-contact sub-nanoscale displacement measurement system while maintaining 99.3% measurement linearity over a range from 0.68 to 1.1 nanometers with a resolution of approximately 0.052 nm.