Presentation Information
[TuH3-5]Correction of Waveguide Device Characteristics Based on Process Data
○Keita Yamaguchi1, Masashi Ota1, Ai Yanagihara1, Kenya Suzuki1, Osamu Moriwaki1 (1.NTT Corporation)
Keywords:
Planar lightwave circuits (PLCs),Optical filters,demultiplexers,demodulators,equalizers,programmable circuits/filters,dispersion compensators,and other signal conditioning devices
We propose a fabrication method that uses process data to correct the characteristics of optical devices. The manufacturing variation in the center transmission wavelength of silica-based AWG multiplexers can be suppressed to σ < 0.027-nm.