[WH3] Optical Devices for Sensing and Free-Space Communication Applications

3:00 PM - 3:15 PM JST(6:00 AM - 6:15 AM UTC)

[WH3-4] Integrated Microlens Array on 6×6 Arrayed Photodetector with Photomask Alignment-less Process

○Yoshihisa Ohnuki^1,2, Toshimasa Umezawa², Naokatsu Yamamoto², Kouichi Akahane², Tetsuya Kawanishi^1,2 (1. Waseda University (Japan), 2. National Institute of Information and Communications Technology (Japan))

Keywords:

Photodetectors,Free-space optical transmission

We designed an integrated microlens array on a high-speed 6x6 photodetector (PD) array to improve sensitivity between PD pixels. We also investigated a 4 µm microlens fabrication method using a thermal reflow process.