Presentation Information

[WP-D-11]Enhanced Wafer-Level Propagation Loss Measurement in Silicon Photonic Circuits Using Mach-Zehnder Interferometer With Thermo-Optic Phase Shifter

○Kodai Sato1, Hiroshi Fukuda1,2 (1.Chitose Institute of Science and Technology, 2.Chitose Silicon Research Center)

Keywords:

Photonic integration,Photonic integrated circuits,Si photonic and heterogeneous platform

This study presents a Mach-Zehnder interferometer method incorporating a thermo-optic phase shifter to measure silicon-waveguide propagation loss, minimizing wavelength fluctuations for stable sub-1 dB measurements and achieving greater precision than the conventional cutback method.