[WP-G] Poster Session 2

[WP-G-3] Observation of Nonvolatile Phase Shift in Hf_0.5Zr_0.5O₂ Waveguide Fabricated by Digitally Processed DC Sputtering

○Satoshi Fujiya¹, Yudai Katsura¹, Yuki Takamatsu¹, Hideo Isshiki¹ (1.The University of Electro-Communications)

Keywords:

Optical memory and nonvolatile photonic devices,Programmable,reconfigurable photonics,Photonics in neuromorphic computing and machine learning devices,Photonic quantum computing

A 300 nm Hf_0.5Zr_0.5O₂ (HZO) film was synthesized without heating, exhibiting ferroelectricity. HZO buried optical waveguides had a high confinement factor resulting in a one-time nonvolatile phase shift even at low electric fields.