[P2A] Poster

[P2T6-099] Surface-Confinement-Induced Plasma–Wall Interfacial Instability in Structured PECVD Showerhead Electrodes

*Jinheon Kim^1,2, Taesung Kim¹ (1. Sungkyunkwan University (Korea), 2. Samsung Institute of Technology (Korea))

Keywords:

Plasma–wall interface,Surface confinement,Sheath overlap