[YD] Young Researchers Session

2:00 PM - 2:15 PM JST(5:00 AM - 5:15 AM UTC)

[YD01] Characterization and Formation Mechanism of Sublimable Films During Sublimation Drying Process

*Chen Kuang¹, Ryuta Tsukahara¹, Hiroyuki Fukue¹, Sosuke Hori¹, Naoya Torikai² (1. SCREEN Semiconductor Solutions Co., Ltd. (Japan), 2. Mie University (Japan))

Keywords:

Sublimable films,Pattern collapse,X-ray reflectivity