Presentation Information
[ALPS-I1-02]Simplified Fabrication Process for High-Q Aluminum Nitride Microresonators
*Haochen Yan1,2, Shuangyou Zhang3,1, Arghadeep Pal 1,2, Alekhya Gosh1,2, Abdullah Alabbadi1,2, Masoud Kheyri1,2, Tobi Bi 1,2, Yaojing Zhang 1, Pascal Del’Haye1,2 (1. Max-Planck Institute, Science of Light, 2. Department of Physics, Friedrich-Alexander-Universität Erlangen-Nürnberg, 3. Department of Electrical and Photonics Engineering, Technical University of Denmark)