Presentation Information
[ALPSp1-23]Demonstration of novel inspection method for sub-millimetre order using Laser-Induced Vibration
*Reo Terauchi1, Katsuhiro Mikami2, Kenichi Ikeda3, Yusuke Nakaminami3, Masanori Otake3 (1. Graduate School of Kindai University, 2. Kindai University, 3. Opto Systems Co., LTD.)
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