Presentation Information
[META8-05]Wafer-scale Infrared Metalens on 200 mm Si substrates through Deep-UV Lithography
*Kai Sun1, Xingzhao Yan2, Jordan Scott1, Jun-Yu Ou1, Otto L. Muskens1 (1. Physics and Astronomy, University of Southampton, 2. Optoelectronics Research Centre, University of Southampton)