Presentation Information
[XOPT8-01]Development of an etching technique using atmospheric pressure plasma to realize a distortion-free Ge channel-cut crystal monochromator
*Masafumi Miyake1, Shotaro Matsumura1, Iori Ogasahara1, Taito Osaka2, Jumpei Yamada1, Daisetsu Toh1, Kazuto Yamauchi3, Makina Yabashi2,4, Yasuhisa Sano1 (1. Graduate School of Engineering, Osaka University, 2. RIKEN SPring-8 Center, 3. Osaka University-RIKEN Center for Science and Technology, Osaka University, 4. Japan Synchrotron Radiation Research Institute)