OPTICS & PHOTONICS International Congress 2025
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Session Details

OPTM2025 : Oral Presentation

Quality Inspection

Wed. Apr 23, 2025 10:30 AM - 12:15 PM JST
Wed. Apr 23, 2025 1:30 AM - 3:15 AM UTC
213 (Conference Center)
Session Chair: Masaki Michihata (The Univesity of Tokyo)
10:30 AM - 11:00 AM JST(1:30 AM - 2:00 AM UTC)

[OPTM6-01(Invited)]Confocal Spectropolarimetric Microscope Based on Channeled Spectropolarimetry

*Kazuhiko Oka1, Hikaru Kimura1, Takumu Abe1, Xiaoshuai Chen1 (1. Hirosaki University)
11:00 AM - 11:30 AM JST(2:00 AM - 2:30 AM UTC)

[OPTM6-02(Invited)]Optical Critical Dimension Metrology of HAR Micro and Sub-Micro Structures Using AI-Driven Optical Scatterometry for Advanced Semiconductor Packaging

*Ling-Chia Chen1 (1. National Taiwan University)
11:30 AM - 11:45 AM JST(2:30 AM - 2:45 AM UTC)

[OPTM6-03]Industrial solution for 12" wafer high speed quality inspection -
FSS 310

*Markus Kogel-Hollacher1, Stefan Weiss1, Simon Mieth1, Oliver Schulz1 (1. Precitec Optronik GmbH)
11:45 AM - 12:00 PM JST(2:45 AM - 3:00 AM UTC)

[OPTM6-04]Research on image quality optimization and point cloud processing algorithms for micro-bump height measurement

*Haoxuan Zhu1, Bin Liu1, Jiantao Lan2, Xin Liu2, Chaoqian Zhang2, Tianling Ren3, Guanhao Wu1 (1. BNRist, Dept. of Precision Instrument, Tsinghua University, 2. Beijing C&W Electronics (Group) Co., Ltd., Beijing Electronics Holding Co., Ltd, 3. BNRist, School of Integrated Circuit, Tsinghua University)
12:00 PM - 12:15 PM JST(3:00 AM - 3:15 AM UTC)

[OPTM6-05]Addressing Optical Path Maintenance Need in Infrared Small Target Detection Applications

Birce Gulec Boyaci Mutlu1, *Tolga Aksoy1 (1. ASELSAN)
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