OPTICS & PHOTONICS International Congress 2025
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Session Details

OPTM2025 : Oral Presentation

Quality Inspection

Tue. Apr 22, 2025 3:15 PM - 5:00 PM JST
Tue. Apr 22, 2025 6:15 AM - 8:00 AM UTC
213 (Conference Center)
Session Chair: Masaki Michihata (The Univesity of Tokyo)
3:15 PM - 3:45 PM JST(6:15 AM - 6:45 AM UTC)

[OPTM6-01(Invited)]TBD

*Christian Rembe1 (1. Technical University of Clausthal)
3:45 PM - 4:15 PM JST(6:45 AM - 7:15 AM UTC)

[OPTM6-02(Invited)]Optical Critical Dimension Metrology of HAR Micro and Sub-Micro Structures Using AI-Driven Optical Scatterometry for Advanced Semiconductor Packaging

*Ling-Chia Chen1 (1. National Taiwan University)
4:15 PM - 4:30 PM JST(7:15 AM - 7:30 AM UTC)

[OPTM6-03]Industrial solution for 12" wafer high speed quality inspection -
FSS 310

*Markus Kogel-Hollacher1, Stefan Weiss1, Simon Mieth1, Oliver Schulz1 (1. Precitec Optronik GmbH)
4:30 PM - 4:45 PM JST(7:30 AM - 7:45 AM UTC)

[OPTM6-04]Research on image quality optimization and point cloud processing algorithms for micro-bump height measurement

*Haoxuan Zhu1, Bin Liu1, Jiantao Lan2, Xin Liu2, Chaoqian Zhang2, Tianling Ren3, Guanhao Wu1 (1. BNRist, Dept. of Precision Instrument, Tsinghua University, 2. Beijing C&W Electronics (Group) Co., Ltd., Beijing Electronics Holding Co., Ltd, 3. BNRist, School of Integrated Circuit, Tsinghua University)
4:45 PM - 5:00 PM JST(7:45 AM - 8:00 AM UTC)

[OPTM6-05]Addressing Optical Path Maintenance Need in Infrared Small Target Detection Applications

Birce Gulec Boyaci Mutlu1, *Tolga Aksoy1 (1. ASELSAN)
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