IP Poster Session

[IPp-14] Comparative Analysis of Amorphous IZTO TFTs Fabricated via Co-Sputtering: Influence of Ga and Al Doping on Electrical Characteristics

*Chang-Yong Kim¹, Jae-Sung Yoo², Sung-Yun Byun², Byeong-Jin Jang¹, Hyeon-Jong Kim¹, Kyung-Sun Yoo³, Kyoung-Kook Kim^1,2,3 (1. Department of Semiconductor Engineering and Research Institute of Advanced Convergence Technology, Tech University of Korea, 2. Department of IT Semiconductor Convergence Engineering and and Research Institute of Advanced Convergence Technology, Tech University of Korea, 3. Carbon neutral innovation center, Tech University of Korea)