LDC Poster Session

[LDCp-01] Preliminary Research of Grinding Process of GaN Substrates toward VCSEL Fabrication

*TAO YANG^1,2, BAOPING ZHANG², OHNISHI KAZUKI³, TATSUSHI HAMAGUCHI^1,3 (1. Kyushu University, 2. Xiamen University, 3. Mie University)