Presentation Information
[XOPTp-15]At-Wavelength Metrology facility for EUV, XUV and tender X-ray energy range optics
*Andrey Sokolov1, Frank Eggenstein1, Peter Bischoff1, Simone Vadilonga1, Jonathan Weck1, Peter Baumgärtel1, Manuel Noppel1, Marcel Mertin1, Ingo Packe1, Franz Schäfers1, Frank Siewert1, Jens Viefhaus1 (1. Helmholtz-Zentrum Berlin fur Materialien und Energie)
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