Presentation Information
[XOPTp-16]Development of high-precision nickel electroforming process for EUV and X-ray optics
*Akinari Ito1, Takehiro Kume2, Yuto Nakamura2, Gota Yamaguchi3, Hiroto Motoyama1, Satoru Egawa1, Janli Guo1, Takuya Hosobata1, Hidekazu Mimura1,3 (1. The University of Tokyo, 2. Natsume Optical Corp., 3. RIKEN, SPring-8)
Comment
To browse or post comments, you must log in.Log in