XOPT Poster Session

[XOPTp-42] Green Fluorescent Nanodiamond–PAA Scintillator for EUV and Soft X-ray Beam Diagnostics with Micrometer-Scale Spatial Resolution

*Yueh-Hsun Tsai¹, Wei-Gang Wang¹, Chao-Chang Arthur Chen¹, Huan-Cheng Chang², Tzu-Ping Huang⁴, Yin-Yu Lee⁴, Yu-Chan Lin³, Chi-Hung Hwang³, Chi-Chung Kei³, Tsung-Te Chou³, Chan-Yuen Chang³, Yu-Hsin Yang⁵, Teng-I Yang³ (1. Department of Mechanical Engineering, National Taiwan University of Science and Technology, Taipei, Taiwan, 2. Institute of Atomic Molecular Sciences, Academia Sinica, Taipei, Taiwan, 3. National Center for Instrumentation Research, National Institutes of Applied Research, Hsinchu, Taiwan, 4. National Synchrotron Radiation Research Center, Hsinchu, Taiwan, 5. Department of Electrical Engineering, National Taiwan University, Taipei, Taiwan)