Presentation Information
[4-2-02]Higher Power Piezo-MEMS Actuators for Out of Resonance Operation
*Simon Fichtner1,2, Tom-Niklas Kreutzer1, Shanshan Gu-Stoppel1, Fabian Stoppel1, Fabian Lofink1,2 (1. Fraunhofer ISIT, 2. Kiel University)
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